Electrochemical jet-assisted precision grinding of single-crystal …
A novel electrochemical jet-assisted grinding (EJAG) method is developed for machining three-dimensional complex microstructures on single-crystal SiC. In EJAG, the anodizing of the jet selectively modifies the workpiece surface by anodic oxidation and reduces the local hardness, enabling the use of soft abrasives to grind SiC.
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Micromachines | Free Full-Text | Laser Grinding of Single …
In this paper, we first report the laser grinding method for a single-crystal silicon wafer machined by diamond sawing. 3D laser scanning confocal microscope …
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Mirror-grinding of single-crystal diamond substrates with a …
High-efficiency mirror grinding of single-crystal diamond substrate was investigated. • A rotary grinder with a #15000 diamond wheel was used for mirror …
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Study on machining performance in grinding of Ni-base …
The grinding process, as an important manufacturing method for Ni-base single crystal superalloys, can obtain lower surface roughness and better surface quality.
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Grinding surface and subsurface stress load of nickel-based single …
This distinctive feature positions the nickel-based single crystal superalloy as a crucial material for manufacturing aviation turbine blade roots. Throughout mechanical processing, the grinding of nickel-based single crystal superalloys is notably influenced by stress [34]. Hence, there is a compelling need to delve into the grinding mechanism ...
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Polishing and planarization of single crystal diamonds: state …
Anisotropy is the most prominent challenge of material removal during MP of single crystal diamond (SCD), which has been observed for a long time. Tolkowshy carried out the first scientific experimental research on abrading, grinding, and polishing of diamond . The results show that the material removal is strongly related to the …
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Defect-free Fabrication for Single Crystal Silicon Substrate …
Defect-free Fabrication for Single Crystal Silicon Substrate by Chemo-Mechanical Grinding L. Zhou 1, H. Eda 1, J. Shimizu 1, S. Kamiya 2, H. Iwase 2, S. Kimura 3 1 Faculty of Engineering, Ibaraki University, , Japan 2 Material Engineering Div.II, Toyota Motor Co., , Japan 3 Tokyo Diamond Tool Mfg. Co., Tokyo, Japan …
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Grinding of silicon wafers: A review from historical …
Only single-side grinders that grind one side of the wafer can be used for back grinding. Initially used ones are of Blanchard type and creep-feed type (rotary-table vertical-spindle) [37], [38], [39]. Fig. 3 illustrates the Blanchard-type wafer grinder. A rotary table has several chucks aligned along a circle, and each chuck holds a silicon wafer.
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Grinding Grade Diamond Single Crystal Market Size
New Jersey, United States,- Grinding grade diamond single crystal refers to a high-quality diamond material primarily used for industrial grinding applications. These single crystal diamonds ...
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A nano-MQL grinding of single-crystal nickel-base …
A nano-MQL grinding of single-crystal nickel-base superalloy using a textured grinding wheel. Application. Published: 11 June 2022. Volume 121, pages …
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Laser Grinding of Single-Crystal Silicon Wafer for Surface …
Laser grinding reduced the surface roughness of single-crystal silicon wafer by over 81%, when measured at the mm scale, but achieved a roughness level of only Ra = 75 nm when measured at the micro-scale. Meanwhile, the laser-grinded surface changes were smother because laser grinding removes abundant peaks.
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A nano-MQL grinding of single-crystal nickel-base …
During the grinding of a single-crystal nickel-base superalloy, the high temperature in the grinding zone often causes thermal damage to the machined surface, which severely affects the workpiece performance. In response to this problem, nanoparticle minimum-quantity lubrication grinding with textured grinding wheels (NMQLG-TGW) is …
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Effects of processing parameters and grinding direction
All samples employed in this study were optical-grade CVD single crystal diamonds with a regular cuboid size of (7 × 7 × 0.3) mm 3, which were provided by Zhengzhou Research Institute for Abrasives & Grinding Co. LTD. (Zhengzhou, China).The two main surfaces were oriented along the (100) crystal plane, while the other four …
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Grinding forces in micro slot-grinding (MSG) of single crystal …
A predictive model of grinding force in MSG of three different orientations of single crystal sapphire: C-plane {0001}, A-plane {11 2 ¯ 0} and R-plane {1 1 ¯ 02} are …
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Study on micro-grinding quality in micro-grinding tool for single
Micro-grinding has a wide application for machining meso/micro parts using hard and brittle materials with high precision. In order to investigate the effect of grinding parameters and various micro-grinding tools on micro-grinding quality, experimental trials on side grinding of single crystal silicon (100 lattice orientation) were carried out using …
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Experimental study of surface generation and force
By conducting micro-grinding experiments on single crystal silicon, crack length l c 's empirical formula and ductile-regime transitions are derived, 20 nm and 100 nm h m are turned out to be two critical conditions. 0.5 nm h m which equals to lattice constant is a critical line, micro-grinding forces could have different performances in these ...
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Deformation mechanism and force modelling of the grinding of YAG single
During grinding, slippages occurred along (0 0 1) crystal planes which are the close-packed plane of the YAG single crystal, i.e. the most likely to slip under a compressive stress. Since slippage occurred along the same crystal plane, i.e. the slip planes were parallel to each other in the subsurface, therefore, no brittle removal …
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Phase transition and plastic deformation mechanisms
As shown in Fig. 1(a) and (b), the grinding tests of GaN single crystals were performed on an ultra-precision self-rotating grinder (Harbin Institute of Technology) which has a maximum spindle rotational speed of 4000 r/min. Ceramic-bonded diamond grinding wheels with mesh sizes of #800, #2000, #4000, and #8000 were used in this work due …
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Grinding-Triggered Single Crystal-to-Single Crystal …
We first report single crystal X-ray analysis of ground crystals of mechanochromic luminescence (MCL) that shows single crystal-to-single crystal transformation (SCSCT). Single crystals of [ZnL2] (1-SG, HL = 2-[[[4-(2-benzoxazolyl)phenyl]imino]-methyl]-5-(diethylamino)-phenol) were obtained upon slight grinding of single crystals of …
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Micro fracture behavior of cutting edges in grinding using single
Abstract. This paper presents a micro fracture behavior of the grain cutting edge that is the most important factor controlling the grinding ability of cBN wheels during the grinding process. To grasp a self-sharpening phenomenon due to the micro fracture of the cutting edges, the wear process in grinding with single crystal cBN grains has …
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Formation of subsurface cracks in silicon wafers by grinding
Single-crystal silicon is an important material in the semiconductor and optical industries. However, being hard and brittle, a silicon wafer is vulnerable to subsurface cracks (SSCs) during grinding, which is detrimental to the performance and lifetime of a wafer product.
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A study on the grinding subsurface metamorphic layer
To conduct the single-factor experiment of plane groove grinding on nickel-based single crystal superalloy DD5, we selected the grinding wheel speed (v s), grinding depth (a p), and feed rate (v f) as per the experiment layout presented in Table 4. We utilized a low-speed wire cutting machine to slice the processed workpiece into a …
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Phase transformation of single crystal silicon induced by grinding …
Phase transformation of single crystal silicon (Si) was investigated under various grinding conditions using high-resolution transmission electron microscopy. Nanocrystals with sizes ranging from 6 to 20 nm of diamond cubic silicon (Si-I) and high-pressure phase (Si-III) were observed in the grinding-induced amorphous Si layers. …
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Grinding mechanism and surface quality evaluation strategy …
Abstract. This paper investigated the removal mechanism and surface quality of single crystal 4 H-SiC during the grinding process, as well as the impact of the measurement …
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Investigation on surface generation mechanism of single-crystal …
1. Introduction. Single-crystal silicon is the primary material in the batch-fabricated production of high-performance sensors due to its excellent advantages in mechanical and electronic properties [1], [2].The machining process is an essential method for obtaining a high-quality Si surface [3], [4], [5].In the machining process, the surface …
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Grinding-Triggered Single Crystal-to-Single Crystal …
Grinding-Triggered Single Crystal-to-Single Crystal Transformation of a Zinc(II) Complex: Mechanochromic Luminescence and Aggregation-Induced Emission …
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Grinding forces in micro slot-grinding (MSG) of single crystal sapphire
Micro-slot grinding (MSG) is an important processing method for the micro-machining of hard brittle crystalline materials. Modelling the MSG of crystal material is necessary to understand its precision micro-machining aspects. In this paper, a predictive model is developed for the grinding force in MSG in three different orientations of …
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A nano-MQL grinding of single-crystal nickel-base …
The texture preparation of the grinding wheel and grinding tests were carried out on the high-precision CNC grinder MGK7120 × 6. The workpiece material was single-crystal nickel-base superalloy DD5. Its chemical composition is shown in Table 1. The workpiece size was 20 mm × 7.5 mm × 10 mm, of which 20 mm × 7.5 mm was the processing …
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Single Crystal Orientation, Grinding, and Polishing
Simple goniometer for precise grinding and electropolishing of single crystal surfaces. J. Wendelken S. Withrow C. Foster. Materials Science, Engineering. 1977. A simple goniometer, which can be used to rigidly support a crystal in a precise orientation through all phases of surface preparation, including mechanical, chemical, and ...
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Molecular simulation of the plastic deformation and
Fig. 1 (a) presents the three-dimensional MD model for single grit grinding of 4H-SiC single crystal. The model is composed of a monocrystalline 4H-SiC specimen and a diamond grit. Only the atoms with a thickness of 5a (a = 3.094 Å is a lattice constant) ...
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